Nanofabrication service

Device characterisation

Ellipsometer and profilometer

Our ellipsometer is an accurate tool to measure film thickness and refractive index after material deposition. The spot size is 150 μm, so this information can usually be obtained from wafer scribe lanes. The profilometer can also function as a mechanical stylus to measure step heights after etching.

Four point probe station

A Four Point Probe System is available for resistivity measurements on wafers up to 8 inches (similar to v/d Pauw measurements).

High-resolution SPM

This microscope can be used to visualise single-walled carbon nanotubes, semiconductor nanowires and single proteins. Atomic lattices can be investigated by tunneling current from the probe to the surface of a suitable material and examining the local density of electronic states. The system modes include Atomic Force Microscopy (AFM), Scanning Tunneling Microscopy (STM), force distance curves, Lateral Force Microscopy (LFM), Kelvin Probe Microscopy (KPFM) and Scanning Capacitance Microscopy (SCM).

Integrated SPM-Raman system

This integrated microscopy system consists of a high-performance SPM and laser Raman spectrometer. The system is able to work separately in SPM mode or in a very high-resolution confocal Raman spectroscopy mode. Integration of both systems provides users with the opportunity to perform Tip-Enhanced Raman Spectroscopy (TERS) on nanoscale structures. The system is also capable of performing Atomic Force Microscopy (AFM), Scanning Near-field Optical Microscopy (SNOM) and phase imaging.

Integrated Cryogenic SPM System

This system is configured for high-vacuum scanning probe microscopy and device characterisation in very low temperature environments. The system is cooled to a temperature of less than 10 K by liquid helium and is capable of performing in all standard Atomic Force Microscopy (AFM) modes, Scanning Near-field Optical Microscopy (SNOM), conductive AFM and confocal microscopy. Further, it is integrated with a multi-laser Raman spectrometer system. This system is ideal for conducting research into low temperature semiconductors, such as quantum nanodots, nanowire electronics and optoelectronic devices.

Standard SPM system

This is an entry level SPM system designed for routine microscopy and also constitutes an educational tool for undergraduate and postgraduate projects. The stand-alone system is capable of producing high-resolution topography images at the nanometer scale and can handle wafers of any size. This is ideal for routine analysis of nanofabricated structures by Atomic Force Microscopy (AFM).

Magneto-resistance system

The probe station with in-plane magnetic field is a versatile probe station which will allow magneto-resistance measurements from 10 K and 300 K without the necessity of bonding the contacts. It is perfectly suited to nanodevices, such as carbon nanotube transistors where liquid nitrogen temperatures will reveal most of the effects, as well as for low temperature I-V characterisation on MOSFETs and other electronic devices.

Single-electron transistor system

This cryomagnet system is well-suited for carrying out single and few electron device measurements and other fundamental research on nanoscale devices. The large magnetic field allows a variety of Coulomb blockade measurements.

Deep Level Transient Spectroscopy (DLTS) system

This system can be used for deep level transient spectroscopy which enables unique electronic characterisation of materials. It has an optical window for photo-induced DLTS and a fast pulse interface. The combination of charge and current transient spectroscopy allows the system to function on both semiconductors and other insulating materials.

Micro-Electro Mechanical System (MEMS) tester

This system provides measurements of structural vibrations and surface topology in microstructures, such as MEMS, by means of a microscope integrated with scanning laser-doppler vibrometry, stroboscopic video microscopy and white light interferometry.

Radio Frequency (RF) semi-automatic prober

This is a semi-automatic probe station with Agilent N5250A 67GHz Vector Network Analyser which enables high-precision S-parameter measurements and other RF measurements. It has a micro chamber, providing a dry, shielded wafer enclosure for reduced EMI and RFI interference and access to the 4 RF position controls even when the system is electrically sealed.

DC and low frequency current voltage (IV) system

This probe station is excellent for any top-contact electron device, e.g. MOSFET characterisation. It is associated with an Agilent 4155C. It has a vibration isolation table and a light tight enclosure. The SEIWA stereo zoom microscope allows probing on ads down to 10 microns. We also have a Cascade M150 Probe Station with a triaxial chuck which enables precise I-V and C-V measurements using the back of the wafer as one of the contacts. It also has a temperature dependent chuck for above room temperature measurements.